*Applied Gases for TORR Series
O₂, N₂, Ar, H₂, He, CO₂, Ne, Xe, Kr, B₂H₆, SiH₄, PH₃, GeH₄, AsH₃, H₂Se, Si₂H₆, NF₃, BF₃, PF₃, SiF₄, CF₄, CHF₃, CH₂F₂, C₂F₆, C₃F₆,C₃F₈, C₄F₆, C₄F₈, C₅F₈, CO, NO, F₂, HF, HCl, HBr, N₂O, SF₆, NH₃, Cl₂, BCl₃, CIF₃, SiH₂Cl₂, SiCl₄, WF₆.......

Model	Inlet Pressure gauge (MPa)	Outlet Pressure gauge (MPa)	Max. Working Pressure (MPa)	Flow rate [at N₂]	Weight (kg)
TORR-1300	25 (Max. 15)	0.3  0.6  1.0  1.5	0.2  0.4  0.6  1	250NL/min (P2=0.5)	1.3